Semiconductor process vacuum is mainly used in evaporation, sputtering, PECVD, vacuum dry etching, vacuum adsorption, testing equipment, vacuum cleaning and other bonding processes. In the process of semiconductor production and manufacturing, flammable, explosive and toxic substances and gases are easy to be produced, which will threaten the safety of production and personnel. Therefore, several safety matters should be paid attention to when semiconductor water ring vacuum pump is applied Item:
1. Clean the vacuum pump and other accessories, filters and pipes regularly to avoid overpressure
In the application of semiconductor vacuum pump, the components may be complex, such as SiO2 formed by SiH4 and O2 at the pump port, and HCl formed by hydrolysis of TiCl4; assuming oil sealed mechanical pump, these gas substances may also react with pump oil. These changes assume the formation of particles, condensable substances or corrosive media, which may block the vacuum pump or pipeline system, affect the performance of the vacuum pump, cause pressure rise or overpressure, and the risk mentioned in one point is even greater. Therefore, it is necessary to clean in time and set up filtering equipment when necessary.
2. Concentration of effective dilution harmful gas:
Semiconductors are easy to produce the flammable, explosive and toxic harmful gases mentioned above. Therefore, in the application of semiconductor water ring vacuum pump, it is necessary to prevent some uncontrollable reactions in the vacuum pump or exhaust process when extracting these media. For example, SiH4, PH3, AsH3, B2H6 and other substances, when in contact with air or oxygen, will cause combustion and even explosion; when the mixing ratio of hydrogen in air reaches a certain degree and temperature, it will also burn. These all depend on the amount of the substance and its relationship with the pressure and temperature of the environment. Therefore, the semiconductor vacuum pump in the extraction of these media, the need to use nitrogen and other inert gas, before the compression of these gases will be diluted to the safe range under the conditions at that time.
If the concentration of oxygen in the air is too high, there will be combustion and explosion risk. Therefore, in some cases, it is necessary to pay attention to the concentration of oxygen, and use inert gas to dilute to prevent excessive concentration; it is assumed that the mechanical pump with oil seal may also need to use some inert and oxygen compatible vacuum pump oil, and timely replace the oil filter and oil.
4. Prevent over temperature:
It is easy to understand this point. In the application of semiconductor in vacuum pump, there are many harmful gases. However, whether it is a dry vacuum pump or an oil sealed mechanical pump, the temperature in the pump chamber is too high, and the inflammable, explosive and toxic gases at high temperature are easy to be dangerous.
When we use the water ring vacuum pump, need to pay attention to the use of safety precautions in the conductor, as well as the later use of good operation.